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£235.00
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CRC Press Tribology in Chemical-Mechanical Planarization Book
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Most common price: £235 (20 days, 100.0%)
Price range: £235 - £235
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Description
Key Features
This CRC Press book provides a detailed account of the Chemical-Mechanical Planarization (CMP) process.
The text focuses on how friction and contact influence wear and planarization on nanosurfaces.
Content is written for tribology professionals, chemists, materials scientists, and physicists.
The book serves as a technical resource for engineers in the semiconductor and microelectronics fields.
The first half of the volume is dedicated specifically to the study of CMP technology.
Product Specifications
- Brand
- CRC Press
- Format
- hardcover
- ASIN
- 0824725670
- Domain
- Amazon UK
- Release Date
- 27 September 2019
- Listed Since
- 10 February 2007
Barcode
No barcode data available
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