Tribology In Chemical-Mechanical Planarization - Image 1

£36.90

CRC Press Tribology In Chemical-Mechanical Planarization

Name: Tribology In Chemical-Mechanical Planarization
Brand: CRC Press
Price: 41.52 GBP
Availability: InStock

Mechanics

Price History & Forecast

Last 86 days • 63 data points (No recent data available)

Historical

Generating forecast...

Price Distribution

Price distribution over 86 days • 5 price levels

Days at Price

Current Price

Price Analysis

Most common price: £42 (34 days, 54.0%)

Price range: £34 - £42

Price levels: 5 different prices over 63 days

Description

Product Description The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed account of the CMP process in a language that is suitable for tribology professionals as well as chemists, materials scientists, physicists, and other applied scientists and engineers in fields of semiconductors and microelectronics. The first half of the book is devoted to CMP, while the other focuses on the fundamentals of tribology.As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects. Other topics covered in depth include basics of friction, flash temperature, lubrication fundamentals, basics of wear, polishing particles, and pad wear. The book concludes its focus with CMP practices, discussing mechanical aspects, pad materials, elastic modulus, and cell buckling.Expanding upon the science and technology of tribology to improve the reliability, maintenance, and wear of technical equipment and other material applications, Tribology in Chemical-Mechanical Planarization provides scientists and engineers with clear foresight to the future of this technology. About the Author Liang, Hong; Craven, David

Product Specifications

Brand: CRC Press
Format: paperback
ASIN: 0367393255
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Civil Engineering > Mechanics
Domain: Amazon UK
Release Date: 27 September 2019
Listed Since: 08 August 2019

Barcode

No barcode data available

CRC Press Tribology In Chemical-Mechanical Planarization

Price History & Forecast

Price Distribution

Price Analysis

Description

Product Specifications

Barcode

Similar Products You Might Like

Tribology In Chemical-Mechanical Planarization

Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices

Mechanical Tribology: Materials, Characterization, and Applications

CRC Press - Micro- and Nanoscale Phenomena in Tribology Book

Fundamental and Practical Aspects of Tribology

Advances in Chemical Mechanical Planarization (CMP) (Woodhead Publishing Series in Electronic and Optical Materials)

Modern Tribology Handbook, Two Volume Set (Mechanics & Materials Science)

John Wiley & Sons Tribology and Characterization of Surface Coatings

Tribology of Abrasive Machining Processes

Handbook of Micro/Nano Tribology (Mechanics and Materials Science Series)

Handbook of Micro/Nano Tribology (Mechanics and Materials Science Series)

Surfactants in Tribology, Volume 1

CRC Press - Surface Engineering by Friction-Assisted Processes

Wiley Friction and Wear of Ceramics - Principles and Case Studies

Friction, Wear, and Erosion Atlas

Surfactants in Tribology, Volume 1

Component Surfaces: Manufacturing-Morphology-Property Relationships (Springer Series in Advanced Manufacturing)

Self-Organization During Friction: Advanced Surface-Engineered Materials and Systems Design (Materials Engineering)

Friction-Induced Vibrations and Self-Organization: Mechanics and Non-Equilibrium Thermodynamics of Sliding Contact

Tribology Issues and Opportunities in MEMS: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

Tribology Issues and Opportunities in MEMS: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

Friction-Induced Vibrations and Self-Organization: Mechanics and Non-Equilibrium Thermodynamics of Sliding Contact

CRC Press Nanostructured Thin Films and Coatings: Mechanical Properties

Tribology: Friction and Wear of Engineering Materials