CRC Press Mega-Bit Memory Technology - DRAM Process Book

Explore the evolution of semiconductor memory with Mega-Bit Memory Technology by Hiroyuki Tango. Published by CRC Press, this technical resource examines the rapid progress of LSI process technology. The text focuses on the development of state-of-the-art dynamic random access memory (DRAM) process technologies, which serve as a long-standing technology driver for Si ULSI. Readers will follow the progression of memory capacity as it advances from the 1 Kbit era through to Gbit DRAM. This book provides a detailed look at the technological shifts required to manage increasing density and performance in semiconductor manufacturing. It is a specialized resource for those studying the history and advancement of memory technology and integrated circuit development.