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Academic Press Chemical Mechanical Polishing in Silicon Processing - Volume 63
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Most common price: £160 (80 days, 100.0%)
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Description
Key Features
Volume 63 in the prestigious Semiconductors and Semimetals series, maintaining decades of excellence in semiconductor literature since 1966.
Features contributions from well-known authors and editors specializing in chemical mechanical polishing and silicon processing technologies.
Landmark content with proven citation impact, remaining relevant and referenced years after initial publication.
Co-edited by Professor Eicke R. Weber from the University of California at Berkeley, ensuring current expertise in semiconductor processing.
Comprehensive coverage of chemical mechanical polishing techniques essential for modern silicon semiconductor manufacturing.
Published by Academic Press, a trusted source for engineering and technology reference materials.
Product Specifications
- Brand
- Academic Press
- Format
- paperback
- ASIN
- 0124014933
- Domain
- Amazon UK
- Release Date
- 24 August 2011
- Listed Since
- 13 September 2011
Barcode
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