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£160.00
Academic Press Chemical Mechanical Polishing in Silicon Processing
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Description
Key Features
Part of the renowned Semiconductors and Semimetals series by Academic Press.
Includes contributions from well-known authors and editors in the field.
Highly cited resource that remains relevant years after original release.
Co-edited by Professor Eicke R. Weber of the University of California at Berkeley.
Specialized technical content focused on silicon processing and polishing.
Product Specifications
- Brand
- Academic Press
- Format
- paperback
- ASIN
- 0124014933
- Domain
- Amazon UK
- Release Date
- 24 August 2011
- Listed Since
- 13 September 2011
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