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VDM Verlag Frei applizierbare MOSFET-Sensorfolie zur Dehnungsmessung

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£50.00 £47.50 £48.50 £49.50 £50.50 £51.50 £52.50 11 August 2026 25 August 2026 09 September 2026 24 September 2026 09 October 2026
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Description

Während die Integrationsdichte von Halbleiterchips rasant fortgeschritten ist und fortschreitet, fällt der Miniaturisierungsgrad in der Aufbau- und Verbindungstechnik (AVT) vergleichsweise schwach aus. Ein Ansatz zur Erhöhung der AVT-Packungsdichte ist die Verwendung biegsamer Chips. Schlüssel zu einer sicheren Biegsamkeit ist die Fähigkeit, bruchsichere dünne Chips mit funktionstüchtigen Halbleiterbauelementen zu fertigen. Durch die Kombination von gedünnten Chips und flexiblen Polymersubstraten eröffnet sich insbesondere die Möglichkeit der Entwicklung von dicht gepackten Sensorfolien, also an dreidimensionale Oberflächen applizierbaren Sensorarrays. Diese Arbeit begreift sich als ein Beitrag zur Untersuchung von dünnen CMOS-Chips sowohl hinsichtlich der Bruchsicherheit als auch hinsichtlich des elektrischen Verhaltens von MOSFETs. Die dabei gewonnen Kenntnisse wurden für die Entwicklung einer MOSFET-Sensorfolie angewandt.

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