£63.03

Springer Prozeßtechnologie: Fertigungsverfahren für integrierte MOS-Schaltungen (Mikroelektronik)

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£63 today · all-time low £62 (May 2026) · usually £62

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Last 66 days · 66 data points (no recent data)

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£63.07 £62.34 £62.50 £62.66 £62.82 £62.98 £63.14 01 May 2026 17 May 2026 02 June 2026 18 June 2026 05 July 2026

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Most common price: £62 (42 days, 63.6%)

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Price levels: 2 different prices over 66 days

Description

Prozeßtechnologie behandelt Fertigungsverfahren integrierter Schaltungen in CMOS-Technologie. Hierbei werden zunächst die Einzelprozesse behandelt, die der Strukturerzeugung, Strukturübertragung, Schichterzeugung und Schichtmodifikation zugerechnet werden. Im Anschluß daran wird gezeigt, wie Einzelprozesse zu einem Gesamtprozeß für die Herstellung von CMOS-Schaltungen integriert werden. Auf die Charakterisierung der Prozesse und die Entwicklung der Entwurfsregeln wird eingegangen. Das Buch basiert auf dem reichen Erfahrungsschatz fertigungsorientierter Technologen.

Product Specifications

Format
perfect
Domain
Amazon UK
Publication Date
08 March 1991
Listed Since
25 March 2010

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