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Springer Materials & Process Integration for MEMS: 9 (Microsystems, 9)

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Description

This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications).MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
31 August 2002
Listed Since
27 December 2006

Barcode

No barcode data available

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