Springer Signal Measurement and Estimation Techniques for Micro and Nanotechnology

Covering micro-, nano- and robotic cells, this book presents the state of the art in a range of techniques to measure signals at the micro- and nanoscale. It covers new technologies such as micromanipulation, microassembly and surface force characterization. From the Back Cover Signal Measurement and Estimation Techniques for Micro and Nanotechnology discusses micro, nano and robotic cells and gives a state-of-the-art  presentation of the different techniques and solutions to measure and estimate  signals at the micro and nano scale. New technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface force characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems. This book also:  Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions    Discusses automated micro-assembly, and control of micro-nano robotic devices Presents and links signal measurement and estimation techniques for  micro-nano scale systems with microfabrication methods, sensors integration and control schemes Signal Measurement and Estimation Techniques for Micro and  Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.