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Independently Published Micromachining: Scanning Probe Lithography

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Description

This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
13 March 2019
Listed Since
13 March 2019

Barcode

No barcode data available

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