Tribology In Chemical-Mechanical Planarization - Image 1

£235.00

CRC Press Tribology In Chemical-Mechanical Planarization

Name: Tribology In Chemical-Mechanical Planarization
Brand: CRC Press
Price: 235.0 GBP
Availability: InStock

Mechanics

It has never been this cheap. We have no record of a lower price.

£235 today · cheaper than every other day in the last 3 months

NEW HERE?

Amazon shows you one price. We show you all of them.

Tosheroon watches Amazon prices so you don't have to. Every product on Amazon has a price history — we make it visible. Set the price you'd actually pay, and we'll email you the second it gets there. No app, no account, one email.

WHAT'S ON THIS PAGE

↓ Price chart
when this has been cheap or pricey

↓ Forecast
where the price is heading next

↓ Statistics
all-time high & low, recent range

↑ Price alert
name your number, we'll email you

Price History & Forecast

Grey patches = out of stock. Cheaper = lower on the chart. Hover for exact prices.

Last 54 days · 54 data points (no recent data)

Historical

Generating forecast…

Price Distribution

Price distribution over 54 days • 1 price levels

Days at Price

Price Analysis

Most common price: £235 (54 days, 100.0%)

Price range: £235 - £235

Price levels: 1 different prices over 54 days

Description

The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed account of the CMP process in a language that is suitable for tribology professionals as well as chemists, materials scientists, physicists, and other applied scientists and engineers in fields of semiconductors and microelectronics. The first half of the book is devoted to CMP, while the other focuses on the fundamentals of tribology. As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects. Other topics covered in depth include basics of friction, flash temperature, lubrication fundamentals, basics of wear, polishing particles, and pad wear. The book concludes its focus with CMP practices, discussing mechanical aspects, pad materials, elastic modulus, and cell buckling. Expanding upon the science and technology of tribology to improve the reliability, maintenance, and wear of technical equipment and other material applications, Tribology in Chemical-Mechanical Planarization provides scientists and engineers with clear foresight to the future of this technology.

Product Specifications

Brand: CRC Press
Format: hardcover
ASIN: 0824725670
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Civil Engineering > Mechanics
Domain: Amazon UK
Release Date: 27 September 2019
Listed Since: 10 February 2007

Barcode

No barcode data available

CRC Press Tribology In Chemical-Mechanical Planarization

It has never been this cheap. We have no record of a lower price.

Price History & Forecast

Price Distribution

Price Analysis

Description

Product Specifications

Barcode

Similar Products You Might Like

Tribology In Chemical-Mechanical Planarization

Elsevier Coatings Tribology - Surface Engineering Book

Tribology Issues and Opportunities in MEMS: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

Nano-tribology and Materials in MEMS

Mechanical Tribology: Materials, Characterization, and Applications

Tribology on the Small Scale: A Modern Textbook on Friction, Lubrication, and Wear (Oxford Graduate Texts)

Modern Tribology Handbook, Two Volume Set (Mechanics & Materials Science)

CRC Press Modeling and Analytical Methods in Tribology - Book 8

Tribology Issues and Opportunities in MEMS: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

Fundamental and Practical Aspects of Tribology

ASM Handbook, Volume 18: Friction, Lubrication, and Wear Technology

Polymer Tribology

Surface Modification and Mechanisms: Friction, Stress, and Reaction Engineering

Friction, Wear, and Erosion Atlas

Handbook of Micro/Nano Tribology (Mechanics and Materials Science Series)

Principles and Applications of Tribology

Engineering Tribology

Handbook of Micro/Nano Tribology (Mechanics and Materials Science Series)

Springer Automotive Tribology - Energy, Environment, and Sustainability

Tribology and Applications of Self-Lubricating Materials

Tribology and Surface Engineering for Industrial Applications

Self-Organization During Friction: Advanced Surface-Engineered Materials and Systems Design (Materials Engineering)

Advanced Analytical Methods in Tribology (Microtechnology and MEMS)

Tribological Research and Design for Engineering Systems: Proceedings of the 29th Leeds-Lyon Symposium: Proceedings of the 29th Leeds-Lyon Symposium ... 41 (Tribology and Interface Engineering)