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£148.73

Wiley Spectroscopic Ellipsometry: Principles and Applications

Name: Spectroscopic Ellipsometry: Principles and Applications
Brand: Wiley
Price: 139.39 GBP
Availability: InStock

Chemistry

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Description

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Product Specifications

Brand: Wiley
Format: hardcover
ASIN: 0470016086
Category: Books > Subjects > Science, Nature & Maths > Chemistry
Domain: Amazon UK
Release Date: 26 January 2007
Listed Since: 29 January 2007

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Wiley Spectroscopic Ellipsometry: Principles and Applications

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