Electroceramic-Based MEMS: Fabrication-Technology and Applications: 9 (Electronic Materials: Science & Technology, 9) - Image 1

Price loading...

Springer Electroceramic-Based MEMS: Fabrication-Technology and Applications: 9 (Electronic Materials: Science & Technology, 9)

Name: Electroceramic-Based MEMS: Fabrication-Technology and Applications: 9 (Electronic Materials: Science & Technology, 9)
Brand: Springer

22034765

Industrial Chemistry

Price History & Forecast

No Price Data Available

Price history will appear here once data is collected from Amazon.

Price Distribution

No price data available for histogram

Description

The concept of micromachining of silicon to form micron-scale structures such as cantilevers, free-standing bridges, membranes, and channels and its combination with microelectronics fabrication methodology and technology has resulted in the em- gence of a new category of functional systems called MEMS (microelectomechanical systems). MEMS are miniature systems containing devices or arrays of devices that combine electronics with other components such as sensors, transducers and actuators, and are fabricated by IC (Integrated Circuits) batch processing techniques. The ?eld of electroceramics (inorganic, non-metallic materials, often polycr- talline, with useful electrical and other functional properties) provides a vast number of active materials for sensors, actuators, and electrical and electronic components. Electroceramic thin ?lms can add therefore many useful functionalities to MEMS. At the same time, because the fabrication of ceramics is commonly a high temperature process that often necessitates an oxygen containing atmosphere, because most cer- ics are inert and corrosion resistant, and because the properties of electroceramics are verysensitivetotheprocessingconditions,theintegrationofelectroceramiclayersonto silicon or other substrates and their patterning into functional elements need complex technologies that are still under development. This situation is re?ected in the current positionofelectroceramic-basedMEMSinthemarket:Whilethepotentialisexcellent, ?rst devices are being commercialized only these present days.

Product Specifications

Brand: Springer
Model: 22034765
Format: Hardcover
ASIN: 0387233105
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Chemical > Industrial Chemistry
Domain: Amazon UK
Release Date: 03 March 2005
Listed Since: 30 December 2006

Barcode

No barcode data available

Springer Electroceramic-Based MEMS: Fabrication-Technology and Applications: 9 (Electronic Materials: Science & Technology, 9)

Price History & Forecast

No Price Data Available

Price Distribution

Description

Product Specifications

Barcode

Similar Products You Might Like

Wiley Fundamentals of Electroceramics - Materials and Devices

Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS: 1-5

Silicon Wet Bulk Micromachining for MEMS

Advanced High Tc Ferroelectrics (Physics Research and Technology)

Ceramic Sensors: Technology and Applications

Engineering Ceramics (Engineering Materials)

Materials Chemistry of Ceramics

Silicon Carbide Nanostructures: Fabrication, Structure, and Properties (Engineering Materials and Processes)

William Andrew - Ceramic Thick Films for MEMS and Microdevices

Electrochemical Microsystem Technologies (New Trends in Electrochemical Technology)

Silicon Carbide Microsystems for Harsh Environments: 22 (MEMS Reference Shelf, 22)

MEMS: Fundamental Technology and Applications: 15 (Devices, Circuits, and Systems)

Nanoscale Devices: Fabrication, Functionalization, and Accessibility from the Macroscopic World (NanoScience and Technology)

Nanofabrication: Fundamentals and Applications

Micro-Manufacturing: Design and Manufacturing of Micro-Products

MEMS: Technology, Fabrication Processes & Applications Book

Microengineering, MEMS, and Interfacing: A Practical Guide: 199 (Mechanical Engineering (Marcel Dekker Hardcover))

Wiley Electronic Materials Science - Advanced Science Textbook

MEMS: Fundamental Technology and Applications (Devices, Circuits, and Systems)

Industrial Applications of Nanoceramics (Micro and Nano Technologies)

Bioceramics: From Macro to Nanoscale (Elsevier Series in Advanced Ceramic Materials)

Integration of Functional Oxides with Semiconductors (Springerbriefs in Materials)

Ceramic Interconnect Technology Handbook

Smart Material Systems and MEMS: Design and Development Methodologies