£107.98

Springer - CCD Image Sensors in Deep-Ultraviolet Book

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Description

As deep-ultraviolet (DUV) laser technology matures, new industrial and manufacturing applications are emerging across various sectors. This technical resource from Springer addresses the growing demand for DUV-sensitive charge-coupled device (CCD) cameras, particularly for use in next-generation semiconductor inspection systems. These systems require imaging at shorter DUV wavelengths to inspect deep sub-micron features within integrated circuits. While DUV-responsive CCD cameras are currently available, their long-term stability remains a significant concern for engineers and researchers. This book provides a detailed look at the degradation behavior and damage mechanisms affecting these sensors. By understanding how DUV exposure impacts sensor performance, professionals can better navigate the challenges of implementing these technologies in high-precision environments. This text is an essential reference for those working at the intersection of microtechnology, MEMS, and advanced semiconductor manufacturing.

Key Features

Explores the impact of deep-ultraviolet (DUV) laser technology on modern industrial and manufacturing applications.

Analyzes the requirements for DUV-sensitive CCD cameras in semiconductor inspection systems.

Addresses the challenges of imaging deep sub-micron features in integrated circuits using shorter wavelengths.

Provides technical insights into the long-term stability concerns of DUV-responsive CCD cameras.

Examines specific degradation behavior and damage mechanisms within CCD image sensors.

Serves as a specialized resource for professionals in microtechnology and MEMS fields.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
22 October 2010
Listed Since
20 September 2010

Barcode

No barcode data available

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