Springer - CCD Image Sensors in Deep-Ultraviolet Book

As deep-ultraviolet (DUV) laser technology matures, new industrial and manufacturing applications are emerging across many sectors. This specialized book from Springer addresses the critical needs of modern semiconductor inspection systems, which now require imaging at increasingly shorter DUV wavelengths to inspect deep sub-micron features in integrated circuits. While DUV-sensitive charge-coupled device (CCD) cameras are currently available for these advanced applications, their long-term stability remains a significant technical concern. This text provides a detailed look at the degradation behavior and damage mechanisms affecting these sensors. It serves as a technical resource for professionals and researchers working with DUV-sensitive technology who need to understand how these components perform over time under specialized lighting conditions.