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Springer CCD Image Sensors in Deep-Ultraviolet - Degradation & Damage

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Description

This Springer technical reference examines charge-coupled device image sensors operating in deep-ultraviolet wavelengths, addressing the critical concern of long-term stability in DUV-sensitive CCD cameras used for semiconductor inspection systems. As DUV laser technology advances and industrial applications demand imaging at shorter wavelengths for deep sub-micron feature inspection in integrated circuits, understanding degradation behaviour and damage mechanisms becomes essential for engineers and manufacturers developing next-generation inspection equipment. The book provides comprehensive coverage of CCD sensor performance, failure modes, and reliability considerations specific to ultraviolet applications, making it invaluable for technical professionals working with advanced imaging systems and photonics technology.

Key Features

CCD image sensor technology specifically designed for deep-ultraviolet wavelength applications requiring stable, long-term performance in semiconductor inspection systems.

Comprehensive analysis of degradation behaviour and damage mechanisms in DUV-sensitive charge-coupled device cameras used in integrated circuit manufacturing.

Technical reference from Springer covering advanced imaging solutions for deep sub-micron feature inspection at ultraviolet wavelengths.

Essential resource for engineers developing next-generation semiconductor inspection equipment that operates at increasingly shorter DUV wavelengths.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
01 March 2005
Listed Since
10 December 2006

Barcode

No barcode data available

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