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Selected Papers on Optical Microlithography - SPIE Press

Applied Optics

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Description

Explore the fundamental research in the field of optical microlithography with this professional volume from the SPIE Milestone Series. Published by SPIE Press, this collection brings together significant papers that have shaped the development of microlithography technologies. This book serves as a dedicated resource for professionals and students within the engineering and technology sectors. It is specifically categorized under applied optics and electronics engineering, making it a valuable addition to any technical library focused on communications engineering and optical science. By studying these selected works, readers can gain a deeper understanding of the historical and technical foundations that drive modern lithography processes.

Key Features

Part of the prestigious SPIE Milestone Series, providing access to significant research papers.

Published by SPIE Press, a trusted name in technical and scientific literature.

Focused content for professionals in applied optics and electronics engineering.

A specialized resource for those studying science, nature, and mathematics.

Categorized for easy identification within engineering and technology libraries.

Product Specifications

Format: paperback
ASIN: 0819409863
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electronics & Communications Engineering > Electronics Engineering > Applied Optics
Domain: Amazon UK
Release Date: 15 June 2006
Listed Since: 17 October 2006

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Selected Papers on Optical Microlithography - SPIE Press

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