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Oxford University Press Oxford Fabrication Engineering at the Micro and Nanoscale

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Description

The third edition of Fabrication Engineering at the Micro and Nanoscale by Oxford University Press offers a thorough introduction to micro and nano fabrication. This text is designed for advanced undergraduate or first-year graduate students studying semiconductor or microelectronic fabrication. It provides a complete overview of the basic unit processes required to fabricate integrated circuits and other devices. This revised edition covers the physics and chemistry of each process to provide a deep understanding of the field. Readers will benefit from expanded coverage of the frontiers of fabrication processes, along with more worked examples and illustrations to aid learning. It serves as a comprehensive resource for anyone studying the engineering and technology behind modern microelectronics.

Key Features

This third edition from Oxford University Press provides a complete introduction to all fields of micro and nano fabrication.

The text covers all basic unit processes used to fabricate integrated circuits and other specialized devices.

Students can study the specific physics and chemistry behind each fabrication process included in the book.

This edition features expanded coverage of the frontiers of fabrication processes for modern engineering study.

The book includes more worked examples and illustrations to support advanced undergraduate and graduate coursework.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
10 January 2008
Listed Since
05 June 2007

Barcode

No barcode data available

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