£126.50

MEMS: Technology, Fabrication Processes & Applications Book

Public Health

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Description

Explore the world of Micro Electro Mechanical Systems (MEMS) with this comprehensive technical text. This book examines how top-down technologies enable the manufacture of structures smaller than the micrometer scale. Developed by applying semiconductor microfabrication technologies in the late 1980s, MEMS allows for the creation of three-dimensional microstructures and mechanical systems. This resource explains the advantages of batch fabrication, which allows for the production of numerous devices simultaneously. It also covers the ability to integrate multiple functional units within a small area, a capability necessary for developing smart and sophisticated devices. As part of the Nanotechnology Science & Technology Series, this book provides a deep look into the processes that drive modern micro-scale engineering and device integration.

Key Features

Covers top-down technologies used to manufacture structures at the micrometer scale.

Explains the application of semiconductor microfabrication to create three-dimensional microstructures.

Provides details on the batch fabrication of large numbers of devices.

Discusses the integration of multiple functional units in small areas for smart device development.

Part of the Nanotechnology Science & Technology Series for specialized technical study.

Product Specifications

Format: Hardcover
ASIN: 1608764745
Category: Books > Subjects > Health, Family & Lifestyle > Medical & Healthcare Practitioners > General Medical Issues > Public Health
Domain: Amazon UK
Release Date: 18 March 2011
Listed Since: 18 September 2009

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MEMS: Technology, Fabrication Processes & Applications Book

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