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£126.50
MEMS: Technology, Fabrication Processes & Applications Book
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Description
Key Features
Covers top-down technologies used to manufacture structures at the micrometer scale.
Explains the application of semiconductor microfabrication to create three-dimensional microstructures.
Provides details on the batch fabrication of large numbers of devices.
Discusses the integration of multiple functional units in small areas for smart device development.
Part of the Nanotechnology Science & Technology Series for specialized technical study.
Product Specifications
- Format
- hardcover
- ASIN
- 1608764745
- Domain
- Amazon UK
- Release Date
- 18 March 2011
- Listed Since
- 18 September 2009
Barcode
No barcode data available
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