CRC Press - Crystal Growth and Evaluation of Silicon for VLSI

Silicon has revolutionized the electronics industry and impacted nearly every area of science and technology. While silicon is abundant in nature as silica, its high reactivity makes separating it from chemical compounds a complex task. As a solid, silicon remains stable and chemically inert, yet the process of growing it as a single crystal presents significant technological hurdles for engineers and researchers. Crystal Growth and Evaluation of Silicon for VLSI and ULSI serves as a foundational resource for understanding these processes. This book is among the first to provide a systematic look at the growth of silicon single crystals. It addresses the specific challenges involved in preparing silicon for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI) applications. Whether you are studying semiconductor physics or working in microelectronics manufacturing, this text offers essential insights into the material science required to advance modern computing and microprocessor architecture.