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Springer Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

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Description

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
18 April 2023
Listed Since
23 November 2022

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