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IntechOpen Micromachining Techniques for Fabrication of Micro and Nano Structures

Amazon

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Description
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.

Product Specifications
Brand
IntechOpen
Model
23937
Format
hardcover
ASIN
9533079061
Category
Books > Subjects > Biography > Professionals & Academics > Science
Domain
Amazon UK
Release Date
03 February 2012
Listed Since
19 March 2014

Barcode

No barcode data available

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