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Springer Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon (Springer Theses)

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Description

This singular non-invasive technique for in-line metrology is an outstanding contribution to the field, reporting significant advances in testing the properties of semiconductors, such as the characteristics of ultra-shallow junctions, without destroying them. From the Back Cover One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Product Specifications

Format
paperback
Domain
Amazon UK
Publication Date
17 July 2014
Listed Since
18 July 2014

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