£46.99

Springer Werkstückbegleitender Informationsspeicher als Basis für ein informationstechnisches Konzept für Halbleiterfertigungen: 149 (IPA-IAO - Forschung und Praxis, 149)

black & white illustrations, bibliograph

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Description

Die rasche Weiterentwicklung der Mikroelektronik erfordert aus wirtschaftlichen und technologischen Gründen eine Optimierung der Chipherstellung unter fertigungstechnischen Gesichtspunkten. Neben einer Erhöhung des Automatisierungsgrades ist es besonders erforderlich, das durch die manuellen Eingriffe und den Laborcharakter bedingte Fehlerpotential in der Fertigung zu senken sowie die Ausfallsicherheit der Fertigung zu erhöhen. Mit Blick darauf werden die spezifischen Merkmale der Halbleiterfertigung analysiert und daraus die Anforderungen an ein darauf abgestimmtes informationstechnisches Konzept abgeleitet. Dabei zeigt sich, daß Bediener, Leittechnik, Fertigungsgerät und Fördergut berücksichtigt werden müssen. Nach einer Strukturierung von Fertigungsdaten sowie einer Definition von Funktionsebenen und Organisationseinheiten wird ein Spektrum von Lösungen für die integrierte, automatisierte Betriebsdatenerfassung, Prozeßdatenvorgabe und Fördergutidentifikation erarbeitet und bewertet. Für die ausgewählte Lösung wird eine Konzeption mit einem Prototyp entwickelt. Anhand von Erfahrungen aus einer Pilotimplementierung werden die Einsatzmöglichkeiten und -grenzen des Informationssystems aufgezeigt.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
07 November 1990
Listed Since
21 February 2011

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