£58.80

Amorphous Silicon Carbide Thin Films: Deposition, Characterization, Etching & Piezoresistive Sensors Applications (Materials Science and Technologies)

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Description

Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
01 February 2012
Listed Since
29 April 2011

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