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Wiley Extreme Ultraviolet Lithography (Press Monographs)

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£58.00 £55.10 £56.26 £57.42 £58.58 £59.74 £60.90 26 July 2026 03 August 2026 12 August 2026 20 August 2026 29 August 2026
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Description
In this second edition of Extreme Ultraviolet Lithography, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also discussed. Many updates are included that reflect the significant advances in EUV lithography since the publication of the first edition. All topics are approached from the perspective of a practicing lithographer in a wafer fab, working in either manufacturing or development, and there are many references at the end of each chapter.

Product Specifications
Brand
Wiley
Format
paperback
ASIN
1510692533
Category
Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electronics & Communications Engineering > Electronics Engineering > Applied Optics
Domain
Amazon UK
Release Date
11 April 2026
Listed Since
12 December 2025

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