Springer BioNanoFluidic MEMS (MEMS Reference Shelf)

This hands-on guide details biosensor development fundamentals and will provide inspiration to those who would like to develop and implement novel biosensors for agriculture, biomedical, homeland security, as well as environmental and disease identification. It also offers hands-on instruction on how to design, fabricate, test and implement next generation biosensors. The volume provides information on BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies. In addition, it offers complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration. It also details hands-on steps for implementation of biosensor fabrication, including a discussion of clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition and others.