£171.98

Wiley Specialty Gas Analysis: A Practical Guidebook

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£171.98 £168.67 £169.39 £170.11 £170.84 £171.56 £172.28 26 April 2026 09 May 2026 23 May 2026 06 June 2026 20 June 2026

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Description

The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.

Product Specifications

Brand
Wiley
Format
hardcover
Domain
Amazon UK
Release Date
16 May 1997
Listed Since
09 February 2007

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