Elsevier Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2: Creating and Measuring Vacuum (Vacuum and Thin-Film Deposition Technologies)

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2: Creating and Measuring Vacuum reviews the many specialized components that must be effectively integrated to create, support, and measure vacuum. This includes pipes, valves, flexible bellows, and several types of vacuum pumps, including rotary vane, dry scroll, turbomolecular, and cryogenic varieties. Pressure sensors are also reviewed with specific attention to their operating principles, pressure range, accuracy, reproducibility, and calibration. The unique features of various vacuum components are highlighted to aid in the selection of devices appropriate for specific pressure ranges and operating conditions. This volume informs the reader about critical vacuum components and how they can be integrated in a complete, dynamically pumped, vacuum system. The specific nuances related to pressure ranges and vacuum component characteristics are featured. Design considerations, such as vacuum gauge placement relative to active gas flows, pressure differentials, and pressure control approaches are also discussed. Covers the full range of vacuum components needed to build, operate, and maintain a dynamically pumped vacuum system Discusses pipes, valves, vacuum pumps, pressure gauges and the considerations that determine their applicability to specific pressure ranges Provides a basic introduction to vacuum system components and how they may be integrated to produce desired results