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CRC Press Radio-Frequency Capacitive Discharges

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Description

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists. About the Author Raizer, Yuri P.; Shneider, Mikhail N.; Yatsenko, Nikolai A.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
27 September 2019
Listed Since
26 September 2019

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